Shunpeng Lu 1,2Jiangxiao Bai 1,2Hongbo Li 1,2Ke Jiang 1,2[ ... ]Dabing Li 1,2,**
Author Affiliations
Abstract
1 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Key Laboratory of Electronic Materials and Devices of Tianjin, School of Electronics and Information Engineering, Hebei University of Technology, Tianjin 300401, China
240 nm AlGaN-based micro-LEDs with different sizes are designed and fabricated. Then, the external quantum efficiency (EQE) and light extraction efficiency (LEE) are systematically investigated by comparing size and edge effects. Here, it is revealed that the peak optical output power increases by 81.83% with the size shrinking from 50.0 to 25.0 μm. Thereinto, the LEE increases by 26.21% and the LEE enhancement mainly comes from the sidewall light extraction. Most notably, transverse-magnetic (TM) mode light intensifies faster as the size shrinks due to the tilted mesa side-wall and Al reflector design. However, when it turns to 12.5 μm sized micro-LEDs, the output power is lower than 25.0 μm sized ones. The underlying mechanism is that even though protected by SiO2 passivation, the edge effect which leads to current leakage and Shockley-Read-Hall (SRH) recombination deteriorates rapidly with the size further shrinking. Moreover, the ratio of the p-contact area to mesa area is much lower, which deteriorates the p-type current spreading at the mesa edge. These findings show a role of thumb for the design of high efficiency micro-LEDs with wavelength below 250 nm, which will pave the way for wide applications of deep ultraviolet (DUV) micro-LEDs.
AlGaN deep ultraviolet micro-LEDs light extraction efficiency size effect edge effect 
Journal of Semiconductors
2024, 45(1): 012504
祁建海 1,2,*陈洋 1,2岳圆圆 3吕炳辰 1,2[ ... ]黎大兵 1,2
作者单位
摘要
1 中国科学院长春光学精密机械与物理研究所, 发光及应用国家重点实验室, 长春 130033
2 中国科学院大学, 材料科学与光电工程中心, 北京 100049
3 吉林财经大学管理科学与信息工程学院, 长春 130117
二维(2D)石墨烯具有原子层厚度, 在电子器件中展示出突破摩尔定律限制的巨大潜力。目前, 化学气相沉积(CVD)是一种广泛应用于石墨烯生长的方法, 满足低成本、大面积生产和易于控制层数的需求。然而, 由于催化金属(例如Cu)衬底一般为多晶特性, 导致CVD法生长的石墨烯晶体质量相对较差。为此, 通过高温退火工艺制备了Cu (111)单晶衬底, 使石墨烯的初始成核过程得到了很好的控制, 从而实现了厘米尺寸的高质量单晶石墨烯的制备。根据二者的晶格匹配关系, Cu (111)衬底为石墨烯生长提供了唯一的成核取向, 相邻石墨烯成核岛的边界能够缝合到一起。单晶石墨烯具有高电导率, 相较于原始多晶Cu上生长的石墨烯(1 415.7 Ω·sq-1), 其平均薄层电阻低至607.5 Ω·sq-1。高温退火能够清洁铜箔, 从而获得表面粗糙度较低的洁净石墨烯。将石墨烯用于场效应晶体管(FET), 器件的最大开关比为145.5, 载流子迁移率为2.31×103 cm2·V-1·s-1。基于以上结果, 相信本工作中的单晶石墨烯还满足其他高性能电子器件的制备。
石墨烯 高温退火 化学气相沉积 场效应晶体管 Cu (111) Cu (111) graphene high-temperature annealing chemical vapor deposition field-effect transistor 
人工晶体学报
2023, 52(11): 1980
Ke Jiang 1,2†Simeng Liang 3†Xiaojuan Sun 1,2,*Jianwei Ben 1,2[ ... ]Ke Xu 3,4,***
Author Affiliations
Abstract
1 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 State Key Laboratory of Virology, College of Life Sciences, Wuhan University, Wuhan 430072, China
4 Institute for Vaccine Research, Animal Biosafety Level 3 Laboratory, Wuhan University, Wuhan 430072, China
Efficient and eco-friendly disinfection of air-borne human respiratory RNA viruses is pursued in both public environment and portable usage. The AlGaN-based deep ultraviolet (DUV) light-emission diode (LED) has high practical potentials because of its advantages of variable wavelength, rapid sterilization, environmental protection, and miniaturization. Therefore, whether the emission wavelength has effects on the disinfection as well as whether the device is feasible to sterilize various respiratory RNA viruses under portable conditions is crucial. Here, we fabricate AlGaN-based DUV LEDs with different wavelength on high-temperature-annealed (HTA) AlN/Sapphire templates and investigate the inactivation effects for several respiratory RNA viruses. The AlN/AlGaN superlattices are employed between the template and upper n-AlGaN to release the strong compressive stress (SCS), improving the crystal quality and interface roughness. DUV LEDs with the wavelength of 256, 265, and 278 nm, corresponding to the light output power of 6.8, 9.6, and 12.5 mW, are realized, among which the 256 nm-LED shows the most potent inactivation effect in human respiratory RNA viruses, including SARS-CoV-2, influenza A virus (IAV), and human parainfluenza virus (HPIV), at a similar light power density (LPD) of ~0.8 mW/cm2 for 10 s. These results will contribute to the advanced DUV LED application of disinfecting viruses with high potency and broad spectrum in a portable and eco-friendly use.
AlGaN DUV LED superlattice SARS-CoV-2 influenza A virus 
Opto-Electronic Advances
2023, 6(9): 230004
聂子凯 1,2,*贲建伟 1,2张恩韬 1,2马晓宝 1,2[ ... ]黎大兵 1,2
作者单位
摘要
1 中国科学院长春光学精密机械与物理研究所, 发光学及应用国家重点实验室, 长春 130033
2 中国科学院大学, 材料科学与光电工程中心, 北京 100049
本文在具有0.2°至1.0°斜切角的c面蓝宝石衬底上通过金属有机化合物化学气相沉积(MOCVD)生长了台阶聚束表面形貌AlN外延层, 并系统研究了高温退火过程中其表面形貌演化规律, 且基于第一性原理计算揭示了表面形貌演化背后的物理机制。研究发现, 随退火温度逐步升高, AlN外延层台阶边缘首先出现具有六方结构特征的热刻蚀凹坑, 随后在台面上形成边缘规则的多边形凹坑, 其主要原因是AlN表面台阶边缘处Al-N原子对脱附能量(10.72 eV)小于台面处Al-N原子对脱附能量(12.12 eV)。此外, 由于台阶宽度随斜切角增大而变窄, 台面处凹坑在扩张过程中易与台阶边缘处凹坑发生合并形成V形边缘, 斜切角越大台面上凹坑数量越少。本文阐明了不同斜切角蓝宝石衬底上生长的AlN在高温热退火过程中台阶聚束形貌演变机制, 为面内组分调制的AlGaN基高效深紫外LED提供基础。
氮化铝 表面形貌 高温热退火 台阶聚束 斜切衬底 热刻蚀 AlN surface morphology high-temperature anneal step bunching miscut substrate thermal etch 
人工晶体学报
2023, 52(6): 1016
作者单位
摘要
1 Key Laboratory of Automobile Materials MOE, School of Materials Science and Engineering, Electron Microscopy Center, and International Center of Future Science, Jilin Provincial International Cooperation Key Laboratory of High-Efficiency Clean Energy Materials, Jilin University, Changchun 130012, China
2 Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
3 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
Oxygen evolution reaction Hydrogen evolution reaction Bifunctional electrocatalyst Overall water splitting 
Frontiers of Optoelectronics
2022, 15(3): s12200
Long Guo 1,2Ke Jiang 1,2,4,*Xiaojuan Sun 1,2Zihui Zhang 1,3[ ... ]Dabing Li 1,2,5,*
Author Affiliations
Abstract
1 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Key Laboratory of Electronic Materials and Devices of Tianjin, School of Electronics and Information Engineering, Hebei University of Technology, Tianjin 300401, China
4 e-mail: jiangke@ciomp.ac.cn
5 e-mail: lidb@ciomp.ac.cn
AlGaN solar-blind ultraviolet (SBUV) detectors have potential application in fire monitoring, corona discharge monitoring, or biological imaging. With the promotion of application requirements, there is an urgent demand for developing a high-performance vertical detector that can work at low bias or even zero bias. In this work, we have introduced a photoconductive gain mechanism into a vertical AlGaN SBUV detector and successfully realized it in a p-i-n photodiode via inserting a multiple-quantum-well (MQW) into the depletion region. The MQW plays the role of trapping holes and increasing carrier lifetime due to its strong hole confinement effect and quantum confinement Stark effect. Hence, the electrons can go through the detector multiple times, inducing unipolar carrier transport multiplication. Experimentally, an AlGaN SBUV detector with a zero-bias peak responsivity of about 0.425 A/W at 233 nm is achieved, corresponding to an external quantum efficiency of 226%, indicating the existence of internal current gain. When compared with the device without MQW structure, the gain is estimated to be about 103 in magnitude. The investigation provides an alternative and effective approach to obtain high current gain in vertical AlGaN SBUV detectors at zero bias.
Photonics Research
2021, 9(10): 10001907
Author Affiliations
Abstract
1 Institute for Electric Light Sources, School of Information Science and Technology, and Academy of Engineering and Technology, Fudan University, Shanghai 200433, China
2 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
Due to the bandwidth limitation of the ultraviolet-C (UV-C) optical communication system and strong channel attenuation, it is difficult to transmit high-frequency signals. In this paper, the temporal ghost imaging (TGI) algorithm was first applied to the UV-C communication experimentally, and we realized the transmission of a 4 GHz signal through 95.34 MHz system bandwidth. The study indicates that the TGI algorithm can significantly improve the signal-to-noise ratio (SNR) compared with the on–off keying method. Our research provides a new approach for alleviating transmission frequency limitation due to poor SNR and insufficient hardware bandwidth.
temporal ghost imaging UV-C communication ultra-high-frequency signal transmission 
Chinese Optics Letters
2021, 19(11): 110602
Author Affiliations
Abstract
1 State Key Laboratory of Reliability and Intelligence of Electrical Equipment, Hebei University of Technology, Tianjin 300401, China
2 Key Laboratory of Electronic Materials and Devices of Tianjin, School of Electronics and Information Engineering, Hebei University of Technology, Tianjin 300401, China
3 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
4 e-mail: zh.zhang@hebut.edu.cn
5 e-mail: sunxj@ciomp.ac.cn
In this work, a self-powered GaN-based metal-semiconductor-metal photodetector (MSM PD) with high responsivity has been proposed and fabricated. The proposed MSM PD forms an asymmetric feature by using the polarization effect under one electrode, such that we adopt an AlGaN/GaN heterojunction to produce the electric field, and by doing so, an asymmetric energy band between the two electrodes can be obtained even when the device is unbiased. The asymmetric feature is proven by generating the asymmetric current-voltage characteristics both in the dark and the illumination conditions. Our results show that the asymmetric energy band enables the self-powered PD, and the peak responsivity wavelength is 240 nm with the responsivity of 0.005 A/W. Moreover, a high responsivity of 13.56 A/W at the applied bias of 3 V is also achieved. Thanks to the very strong electric field in the charge transport region, when compared to the symmetric MSM PD, the proposed MSM PD can reach an increased photocurrent of 100 times larger than that for the conventional PD, even if the illumination intensity for the light source becomes increased.
Photonics Research
2021, 9(5): 05000734
贲建伟 1,*孙晓娟 1,2蒋科 1,2陈洋 1,2[ ... ]吕威 1,3
作者单位
摘要
1 中国科学院长春光学精密机械与物理研究所,长春 130033
2 中国科学院大学,材料与光电研究中心,北京 100049
3 长春工业大学,长春 130012
AlGaN基材料是带隙可调的直接带隙宽禁带半导体材料,是制备紫外(UV)光电子器件的理想材料。经过数十年的研究,目前已经在异质衬底外延生长AlGaN基材料、高效掺杂等方面取得了巨大进展。以此为基础,AlGaN基紫外光电器件制备领域也得到长足发展。在本综述中,主要介绍了高质量AlGaN基材料的MOCVD外延生长方法、掺杂方法以及近年来在紫外发光、紫外探测器件方面取得的进展。
AlGaN基材料 外延生长 掺杂 紫外发光器件 紫外探测 AlGaN based material epitaxy growth doping UV LED UV photodetector 
人工晶体学报
2020, 49(11): 2046
Ke Jiang 1,2Xiaojuan Sun 1,2,6,*Zi-Hui Zhang 1,3Jianwei Ben 1,2,5[ ... ]Dabing Li 1,2,7,*
Author Affiliations
Abstract
1 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Key Laboratory of Electronic Materials and Devices of Tianjin, School of Electronics and Information Engineering, Hebei University of Technology, Tianjin 300401, China
4 Key Laboratory of Advanced Structural Materials, Ministry of Education, Changchun University of Technology, Changchun 130012, China
5 Current Address: College of Materials Science and Engineering, Shenzhen University, Shenzhen 518071, China
6 e-mail: sunxj@ciomp.ac.cn
7 e-mail: lidb@ciomp.ac.cn
AlGaN solar-blind ultraviolet detectors have great potential in many fields, although their performance has not fully meet the requirements until now. Here, we proposed an approach to utilize the inherent polarization effect of AlGaN to improve the detector performance. AlGaN heterostructures were designed to enhance the polarization field in the absorption layer, and a high built-in field and a high electron mobility conduction channel were formed. As a result, a high-performance solar-blind ultraviolet detector with a peak responsivity of 1.42 A/W at 10 V was achieved, being 50 times higher than that of the nonpolarization-enhanced one. Moreover, an electron reservoir structure was proposed to further improve the performance. A higher peak responsivity of 3.1 A/W at 30 V was achieved because the electron reservoir structure could modulate the electron concentration in the conduction channel. The investigation presented here provided feasible approaches to improve the performance of the AlGaN detector by taking advantage of its inherent property.
Photonics Research
2020, 8(7): 07001243

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